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Leitz (Leica) Laser Autofocus Module for Ergoplan Microscope buy in Hanover
Buy Leitz (Leica) Laser Autofocus Module for Ergoplan Microscope
Leitz (Leica) Laser Autofocus Module for Ergoplan Microscope

Leitz (Leica) Laser Autofocus Module for Ergoplan Microscope

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USA, Hanover
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Technical characteristics
  • BrandLeica
Description
This is a complete Laser Auto Focus subassembly, part of catalog number 573 099, manufactured by Leica Microsystems for their Ergoplan microscope (designed for semiconductor inspection). The module appears to be in perfect condition - the factory seals are still intact in all positions of the module cover. The module is February 1995 - serial number is 168085. The factory seal date is a bit later, January 1997.

An IR beam is directed down to the wafer (which is assumed to be perfectly flat) through the viewing objective off-axis. The beam is then reflected off the sample, and when it returns at the symmetrical position on the opposite side of the objective, the sample is considered in focus. If the beam is too far to one side or the other, the module directs the Z-axis drive to correct the condition. This module houses the IR laser and the beam position detector circuitry. It does not include the driver electronics housing, or the Z-axis drive, or the user control keypad - this is only one component within the system, but it is complete.
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Leitz (Leica) Laser Autofocus Module for Ergoplan Microscope
Leitz (Leica) Laser Autofocus Module for Ergoplan Microscope
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